Onto Innovation, founded in 2019 and headquartered in Wilmington, Massachusetts, operates as a provider of process control solutions for the semiconductor industry. The company's work spans the semiconductor value chain, addressing challenges related to yield, device performance, quality, and reliability in manufacturing.
The firm's product portfolio includes automated high-speed inspection systems for unpatterned and patterned wafers and panels, along with advanced Optical Critical Dimension (OCD) and film metrology tools. It also manufactures advanced packaging steppers and develops process control and analytics software aimed at supporting digital transformation in semiconductor fabrication.
Onto Innovation's technical expertise covers inspection, metrology, lithography, software development, and broader process control disciplines. The company's solutions are designed for semiconductor manufacturers seeking to improve production outcomes through data-driven process management.






